BioMEMS and Microfluidics

High Aspect Ratio Parylene Etching for Microfluidics and Biomems

A novel technique for producing high aspect ratio parylene structures via switching chemistry plasma etching is presented. Parylene C, or poly(monochloro-p-xylylene), has become an increasingly popular MEMS material for its excellent properties and biocompatibility. However, the inability to fabricate closely-spaced high aspect ratio (HAR) structures severely limits the use of parylene, particu...

Development of Surface Micromachining Technologies for Microfluidics and BioMEMS

In the last decade, examples of devices manufactured with SUMMiT technology have demonstrated the capabilities of polysilicon surface micromachining [1]. Currently we are working on enhancements to this technology that utilize additional structural layers of silicon nitride to enable Microfluidics and BioMEMS applications. The addition of the silicon nitride layers allows the fabrication of mic...

Microvalves and Micropumps for BioMEMS

This review presents an extensive overview of a large number of microvalve and micropump designs with great variability in performance and operation. The performance of a given design varies greatly depending on the particular assembly procedure and there is no standardized performance test against which all microvalves and micropumps can be compared. We present the designs with a historical pe...

Delving into BioMEMS.

Micro and nano patterning of carbon electrodes for bioMEMS